Lam Research vs ASML
Updated onCompare Lam Research and ASML side-by-side. See how they stack up on features, pricing, and target market.
Lam Research
Lam Research is a global manufacturer of semiconductor fabrication equipment and services that enable chipmakers to produce advanced integrated circuits.
vs
ASML
ASML is a Dutch multinational that designs, manufactures, and services advanced lithography systems and related software used to mass-produce semiconductor chips.
Which should you choose?
Lam Research
You need non-lithography wafer-fab equipment—etch, deposition, strip/clean, mass metrology—or advanced packaging tools and services from a single vendor.
ASML
You need leading-edge lithography (DUV/EUV/High‑NA) and an integrated stack that includes scanners, computational lithography, and metrology/inspection to pattern wafers.
Key differences
| Category | Lam Research | ASML | Why? |
|---|---|---|---|
| Support | Both provide global lifecycle support—ASML cites around 10,000 customer‑support employees, while Lam emphasizes OEM spares, refurb/repair options, and worldwide distribution. | ||
| Advanced Packaging | Lam targets packaging steps with SP Series wet clean, Phoenix panel‑level processing, and Syndion deep‑silicon etch/TSV tools; ASML recently added an i‑line scanner for advanced packaging but covers fewer packaging process steps. | ||
| Feature Depth (Lithography) | ASML uniquely supplies EUV and now High‑NA EUV scanners and complements them with DUV, metrology/inspection, and computational lithography, whereas Lam does not make lithography tools. | ||
| Feature Depth (Non‑Lithography Processes) | Lam offers a broad portfolio across deposition (CVD/ALD/PECVD/HDP‑CVD/ECD/PLD), dry etch (RIE/ALE/cryogenic), strip/clean, and mass metrology used throughout the fab. | ||
| Integrations | ASML’s “holistic lithography” tightly integrates scanners with computational lithography and HMI metrology/inspection, while Lam’s integration centers on platform‑integrated mass metrology for process control. |
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